• 99.999% Purity Yttrium Oxide Powder (Y2O3) for Thermal Spray Grade Plasma Resistant Coating in Semiconductor Chambers
  • 99.999% Purity Yttrium Oxide Powder (Y2O3) for Thermal Spray Grade Plasma Resistant Coating in Semiconductor Chambers
  • 99.999% Purity Yttrium Oxide Powder (Y2O3) for Thermal Spray Grade Plasma Resistant Coating in Semiconductor Chambers
99.999% Purity Yttrium Oxide Powder (Y2O3) for Thermal Spray Grade Plasma Resistant Coating in Semiconductor Chambers

99.999% Purity Yttrium Oxide Powder (Y2O3) for Thermal Spray Grade Plasma Resistant Coating in Semiconductor Chambers

Product Details:

Place of Origin: Jiangxi, China
Brand Name: High Broad
Certification: ISO 9001:2015, REACH
Model Number: Y2O3-5N

Payment & Shipping Terms:

Minimum Order Quantity: 1000Kilogram
Price: USD 5-100 / Kilogram
Packaging Details: Vacuum sealed inner bag with aluminum foil outer bag, packed in 25kg fiber drums or as per customer requirements
Delivery Time: 5-15 working days after order confirmation
Payment Terms: T/T,L/C,PayPal,Western Union
Supply Ability: 500000 Kilograms per Month
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Detail Information

Density: 5.01 G/cm³ Specific Surface Area: 8-15 M²/g
Particle Size: 1-5 μm Melting Point: 2425 °C
Crystal Structure: Cubic Purity: 99.999% (5N)
Highlight:

5N Yttrium Oxide Powder

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Thermal Spray Coating Grade

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Semiconductor Chamber Protection

Product Description

99.999% (5N) Yttrium Oxide (Y₂O₃) Thermal Spray Grade Powder

Our 99.999% (5N) yttrium oxide powder is manufactured in China using advanced rare earth extraction and purification technology. This thermal spray grade Y₂O₃ powder is specifically engineered for thermal spray coating of semiconductor chamber components, delivering exceptional consistency and performance in demanding industrial coating environments.

99.999% Purity Yttrium Oxide Powder (Y2O3) for Thermal Spray Grade Plasma Resistant Coating in Semiconductor Chambers 0

Key Features

  • Ultra-high 99.999% (5N) purity for minimal contamination in sensitive semiconductor processes
  • Optimized particle size distribution (1-5 μm D50) for consistent thermal spray deposition
  • Excellent plasma etch resistance extends chamber component service life by 3-5x
  • High melting point (2425°C) ensures coating stability under extreme thermal cycling
  • Low impurity levels of Fe, Na, Ca, Si ensure coating purity and dielectric integrity

Technical Specifications

Parameter Specification
Purity 99.999% (5N)
Particle Size D50 1-5 μm
Crystal Structure Cubic
CAS Number 1314-36-9
Appearance White Powder
Density 5.01 g/cm³
Melting Point 2425 °C
Specific Surface Area 8-15 m²/g

Recommended Applications

This yttrium oxide powder is widely used in thermal spray coating, plasma spray deposition, ceramic surface treatment, and other industrial coating processes requiring high purity rare earth materials. Its excellent thermal stability, chemical resistance, and plasma etch resistance make it ideal for protective coatings in harsh operating environments.

Packaging & Storage

Vacuum sealed inner bag with aluminum foil outer layer to prevent moisture absorption. Packed in 25kg fiber drums with desiccant. Store in a cool, dry place away from acids and moisture.




Contact US


Jane Hu

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Providing most advanced products & most professional technical solution for you!


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China Hunan High Broad New Material Co., Ltd.
70 Chezhan North Road,Changsha, China 410100 
Tel:+86-731-85717705
Fax:+86-731-85716569
Mobile/Whatsapp: +86-139-7515-2932
           highbroad2@vip.163.com      

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